ISSN: 1546-962X
Published Online: 31 January 2005
Page Count: 16

Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components

Rymuza, Z
Warsaw University of Technology,

(Received 30 July 2004; accepted 14 October 2004)

Abstract

Possible methods to control mechanical and tribological behavior of contacting/sliding surfaces in MEMS devices are discussed. Two types of ultrathin films were investigated as possible candidates to use as self-lubricating and wear resistant coatings on MEMS components manufactured using silicon. The techniques of deposition and the results of mechanical and tribological studies on micro/nano-scales of these films are presented and discussed. Wear-resistant coatings were deposited and tested multilayer films being the combinations of the single layers produced using TiN, CrN, and NbN.

Keywords:
ultrathin films, MEMS tribology

Paper ID: JAI12963
DOI: 10.1520/JAI12963
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